New Projection Optics and Aberration Control System for the 45-Nm Node

Toshiyuki Yoshihara,Bunsuke Takeshita,Atsushi Shigenobu,Yasuo Hasegawa,Yoshinori Ohsaki,Kazuhiko Mishima,Seiya Miura

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2007）

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关键词
projection optics,wavefront aberration,lens heating,in-situ metrology
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