Progresses in 300mm DUV Photolithography for the Development of Advanced Silicon Photonic Devices

Charles Baudot,Bertrand Szelag,Nacima Allouti,Corinne Comboroure,Sebastien Berard-Bergery,Christian Vizioz,Sebastien Barnola,Fabien Gays,Denis Mariolle,Thomas Ferrotti,Aurelie Souhaite,Stephane Brision,Christophe Kopp,Sylvie Menezo

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2015）

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Silicon Photonics,300mm DUV dry photolithography

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