Simulations of Spatial DSA Morphology, DSA-aware Assist Features and Block Copolymer-Homopolymer Blends
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2014）
关键词
directed self-assembly,DSA,block copolymers,BCP,SCFT,Monte Carlo
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要