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Properties of Heteroepitaxial 3C-SiC Layer on Si Using Si 2 (CH 3) 6 by CVD

Y. Chen, Y. Masuda, Y. Nishlo,K. Matsumoto,S. Nishino

WIDE-BANDGAP SEMICONDUCTORS FOR HIGH-POWER, HIGH-FREQUENCY AND HIGH-TEMPERATURE APPLICATIONS-1999(2011)

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关键词
single crystal,microstructures,raman scattering,room temperature,nitrogen,schottky diode
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