Development of Wet-Etching Tools for Precision Optical Figuring

M Rushford, S Dixit, R Hyde,J Britten,J Nissen, M Aasen,J Toeppen, C Hoaglan, C Nelson, L Summers, I Thomas

mag（2004）

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mass production,plasma physics,apertures,glass,resistors,heating,optical path difference,near field,velocity,closed loop control,accuracy,etching,scattering,interferometers,shields,thermal diffusion

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