Improving Inspectability of Sub-2x Nm Node Masks with Complex Sraf

In Yong Kang,Gisung Yoon,Jonghee Lee,Donghoon Paul Chung,Byung-Gook Kim,Chan-Uk Jeon,Gregg Inderhees,Trent Hutchinson,Wonil Cho,Jiuk Hur

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2013）

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关键词
Mask inspection,die-to-die inspection,reticle plane inspection,aerial image
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