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INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICES

Hanspeter Moll,G Kar,Martin Popp,Lars Heineck,Peter Lahnor,Arnd Scholz,Stefan Jakschik,Wolfgang Roesner,Gerhard Enders,Werner Graf,Peter Baars,Klaus Muemmler, Bernd Hintze,Andrei Josiek

mag（2010）

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