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Fin Doping by Hot Implant for 14nm Finfet Technology and Beyond

B. Wood,F. Khaja,B. Colombeau,S. Sun,A. Waite,M. Jin,H. Chen,O. Chan,T. Thanigaivelan,N. Pradhan, H. -J. Gossmann,S. Sharma,V. Chavva,M-P Cai,M. Okazaki,S. Munnangi,C-N Ni,W. Suen, C-P Chang,A. Mayur,N. Variam,A. Brand

Meeting abstracts/Meeting abstracts (Electrochemical Society CD-ROM)（2013）

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