Optically Transparent Glass Micro-Actuator Fabricated by Femtosecond Laser Exposure and Chemical Etching
Applied physics letters(2012)
摘要
Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.
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