Detector Fabrication Yield for SuperCDMS Soudan
Journal of low temperature physics(2014)
摘要
The SuperCDMS collaboration is presently operating a 9 kg Ge payload at the Soudan Underground Laboratory in their direct search for dark matter. The Ge detectors utilize double-sided athermal phonon sensors with an interdigitated electrode structure (iZIPs) to reject near-surface electron-recoil events. These detectors each have a mass of 0.6 kg and were fabricated with photolithographic techniques. The detector fabrication advances required and the production yield encountered are described.
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关键词
Dark matter,Cryogenic detectors,Transition edge sensors
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