Sintering behavior and refining grains of high density tin doped indium oxide targets with low tin oxide content

High density indium tin oxide (ITO) ceramic targets with low SnO2 content were prepared successfully by sintering co-precipitationally synthesized powders. The sintering behavior, properties and refining grains of the ITO targets were studied in normal pressure oxygen ambience. Higher sintering temperature promoted sintering densification, resulted in abnormal grain growth and decreased bending strength. By a two-step sintering method, the uniform and fine-grained microstructures were obtained. The sintered density of the ITO targets was further improved. Furthermore, the grain size was reduced, and the bending strength was also enhanced.