Contact Resistance to Al-doped ZnO Thin Films

Ishiang Shih,Yi Chen,Jeanne-Louise Shih,Hadley Myers,Clifford Champness,Han-Jen Yang

2009 34th IEEE Photovoltaic Specialists Conference (PVSC)（2009）

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摘要

Polycrystalline ZnO thin films doped with Al are used as transparent conducting oxide (TCO) for solar cells. For such applications, it is necessary to have control on the contact resistance with metals. In this project, we observed the variation of contact resistance of Au/Ti to Al-doped ZnO thin films with sheet resistance.

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关键词

II-VI semiconductors,aluminium,contact resistance,semiconductor thin films,solar cells,wide band gap semiconductors,zinc compounds,ZnO:Al,contact resistance,polycrystalline thin films,semiconductor thin films,sheet resistance,solar cells,transparent conducting oxide

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