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Kinetic Characteristics of the SAW Humidity Sensor Partially Coated with Graphene Oxide Thin Film

S. M. Balashov,O. V. Balachova,A. V. U. Braga,M. C. Q. Bazetto,A. Pavani Filho,S. Moshkalev

28th Symposium on Microelectronics Technology and Devices (SBMicro 2013)（2013）

Cited 26|Views1
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Key words
SAW sensor,SAW atomizer,humidity sensor,graphene oxide film
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