Characteristics of Silicon Thin Film Thermistors
International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology（2008）
Key words
boron compounds,chemical vapour deposition,elemental semiconductors,semiconductor thin films,silicon compounds,thermistors,Si,amorphous silicon films,boron implantation,integration circuit,linear function,low pressure chemical vapor deposition,polycrystalline silicon,resistance- temperature relationship,silicon thin film thermistors,temperature -50 degC to 150 degC,temperature devices
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