GaBi Alloy Liquid Metal Ion Source for Microelectronics Research
Guilin(2006)
摘要
A GaBi alloy liquid metal ion source has been studied. From an analysis of the source mass spectra as a function of emission current, a mechanism is suggested for the production of single- and double-charged ions. There is good agreement with the results of Swanson's investigations of a pure Bi source.
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关键词
GaBi alloy liquid metal ion source,mass spectra,abundance
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