Sputter-deposited erbium-doped Y2O3 active optical waveguides

Hoekstra, T.H.,Lambeck, P.V.,Albers, H.,Th. J. A. Popma

Electronics Letters （1993）

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摘要

A signal enhancement of 10 dB at 1535 nm with a low launched pump power of 1 mW at 1480 nm is achieved for sputtered Er3+:Y2O3 channel waveguides on oxidised silicon substrates. With the developed reactive co-sputtering process using sputterguns the erbium concentration can be varied easily and reproducibly.

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关键词

erbium,integrated optics,optical pumping,optical waveguides,optical workshop techniques,solid lasers,sputter deposition,sputtered coatings,yttrium compounds,1 mW,1480 nm,1535 nm,Si,Y 2O 3:Er 3+-SiO 2-Si,active optical waveguides,low launched pump power,reactive co-sputtering process,signal enhancement,sputterguns

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