Low-Loss Titanium Dioxide Strip Waveguides Fabricated by Atomic Layer Deposition
Lightwave Technology, Journal of （2014）
关键词
atomic layer deposition,electron beam lithography,optical fabrication,optical waveguides,sputter etching,titanium compounds,ald,ebl,rie,low-loss strip waveguides,propagation losses,reactive ion etching,sidewall roughness,size 30 nm,wavelength 1.55 mum,deposition and fabrication,nanostructure fabrication,waveguides
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