Suspended Nanochannel Resonators at Attogram Precision
IEEE/LEOS International Conference on Optical MEMS（2014）
关键词
micromechanical resonators,microsensors,nanoparticles,oscillators,SNR,attogram precision,mass equivalent frequency stability,mass sensitivity,nanomechanical resonators,nanoparticles concentration,optimized oscillator system,suspended microchannel resonator,suspended nanochannel resonators,target analyte,thermal noise,vacuum level performances
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