Ultra-precision piezoelectric stepping linear actuator

A new type of precise linear actuator using the piezoelectric stack as actuating element was presented. The stator clamps the rotor by a flexure hinge clamping structures in symmetrical directions. The working principle of the actuator was analyzed, and a mathematic model of the mechanical system was set up. The mechanical structure was simulated by the MSC Patran/Nastran software. The experimental test of the actuator prototype was performed and the test results were in agreement with the theoretical analysis results basically. The actuator prototype can move with speed 1. 52 mm/min, and the minimum step size ( moving resolution) is 3. 35 nm. The actuator works stably and reliably, may be used in the domain of precision engineering.