A Monte Carlo Simulation for the Ion Transport in Glow Discharges with Dusts

We use the Monte Carlo method to simulate the ion transport in the rf parallel plate glow discharge with a negative-voltage pulse connected to the electrode. It is found that self-consistent field, dust charge, dust concentration, and dust size influence the energy distribution and the density of the ions arriving at the target, and in particular, the latter two make significant influence. As dust concentration or dust size increases, the number of ions arriving at the target reduces greatly.