Residual Stress Measurement on Hetero-Epitaxial 3C-Sic FilmsR. Anzalone,C. Locke,A. Severino,D. Rodilosso,C. Tringali,G. Foti,S. E. Saddow,F. La Via,G. D'ArrigoMaterials science forum（2009）引用 1|浏览9暂无评分关键词3C-SiC,hetero-epitaxy MEMS,cantileverAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
