Euv Light Source And Laser Considerations For Scalability And High-Energy Conversion Efficiency

Ip Mercer,A Comley,S Davis-Ansted, M Egan,S Ellwi, P Harrison, I Henderson, M Kelly, M Mason, M Middleton, I Morris,D Parsons-Karavassilis,T Nowell, P Raven, A Russel, D Klug, A Taylor

HIGH-POWER LASER ABLATION IV, PTS 1 AND 2（2002）

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Key words

EUV,LPP,NGL,plasma,laser,pulsed,scalable,efficiency,solid state

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