Preparation and Characterization of the CuIn1 − Xalx Metallic Precursors

The CuIn1 − xAlx metallic precursors were obtained by DC magnetron impulse sputtering process. Using Al and CuIn alloy targets, by controlling the target power and sputtering time, so as to realize the Al/(Al+In) composition rations of CIA thin film were controlled accurately. The microstructure and crystal structure of the thin films were analysed by X-Ray diffraction ; the composition of the thin films were investigated by EDS. At last obtain the process of realize the CIA thin film with Al/(Al+In) composition rations were regulated continuously; the Cu/(In+Al) composition rations were approximately 1.