A novel use of rf-GD sputtering for sample surface preparation for SEM: its impact on surface analysis

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany（2008）

引用 1|浏览1

暂无评分

摘要

Through recent advances in ultra-high resolution FE-SEM with novel electron optics and multi-detection systems [1], where SEs, high angle BSEs and channeling BSEs are detected separately, the world of practical surface analysis may be changed drastically.

查看译文

关键词

SEM, sample preparation, rf-GD sputtering

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要