Understanding Faulty Behavior Of A Peristaltic Micropump

M Knight, B Kaminska, J House

DTIP '03: Proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS（2003）

引用 0|浏览3

暂无评分

关键词

elemental semiconductors,etching,microactuators,microfluidics,micropumps,silicon,thermal resistance,faulty behavior,metal deposition,microheaters,peristaltic microfluidic pump,peristaltic micropump,relative thermal isolation,silicon wet etch,thermal isolation,thermal resistance,

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要