Observation of Anomalous High-Resistance to Implanted Areas Caused by Reactive Ion Etching (Rie)H NORSTROM,G KITTLESEN,P WIKLUND,M OSTLING,E NIEMIVacuum(1988)引用 5|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要