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Neutral Beam Injector Oxygen Impurity Measurements and Concentration Reduction Via Gettering Processes

Journal of vacuum science & technology A Vacuum, surfaces, and films(1985)

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摘要
We have measured the reduction of oxygen impurity levels by means of gettering within the arc chambers of the TMX-U neutral-beam injectors using the TMX-U neutral-beam test stand. Our analysis incorporated silicon surface-probe measurements and optical Doppler-shift measurements of the hydrogen alpha spectra of deuterium atoms with energies appropriate for D2O parentage. Without gettering, the Auger electron spectroscopy analysis of an exposed silicon sample showed a large oxygen peak below the surface peak with a concentration equivalence of approximately 2% for an accelerated beam. After gettering, with either titanium or chromium getters, optical monochromator data indicated a reduction in the oxygen concentration of at least a factor of 10, whereas Auger spectroscopy data showed at least a factor of 8 reduction. Other metallic impurities remained below the level of detection even after gettering. Additional effects observed during this study include a change in the accelerated deuterium species concentrations, loss of gettering activity, loss of arc operation, and a change in arc performance due to arc chamber gas absorption during operation.
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