Characterization and dielectric properties of GeOx thin films prepared by radio frequency (RF) reactive sputtering

B.G. Segda,C. Caperaa,M. Jacquet,J.P. Besse

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2008）

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摘要

Dielectric properties of germanium oxide have not been investigated in detail. But, it has been investigated from an optical viewpoint as light waveguide materials. Its electrical properties have rarely been studied for electronic device applications.

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