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A Six‐mask TFT‐LCD Process Using Copper‐gate Metallurgy

P. M. Fryer,E. Colgan, E. Galligan,W. Graham, R. Horton, D. Hunt,L. Jenkins,R. John, P. Koke,Y. Kuo,K. Latzko,F. Libsch,A. Lien,R. Nywening,R. Polastre,M. E. Rothwell,J. Wilson,R. Wisnieff,S. Wright

Journal of the Society for Information Display（1997）

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