Influence of the Hydrogen Evolution on the Structural and Electronic Properties of A-C:H Films

The nature of hydrogen bonding and its influence on the electronic properties and the atomic structure was investigated in two types of a-C:H films prepared in a d.c. multipolar plasma system from pure methane at different substrate bias, by performing H evolution and annealing experiments. The results indicate clearly that these two types of samples have different morphologies in their as-deposited state, and that they behave differently upon annealing up to high temperature.