Nanofabrication of ferromagnetic nanotips and nanobridges by 2D and 3D electron-beam cutting

T. Gnanavel,Z. Saghi,Y. Peng,B. J. Inkson,M. R. J. Gibbs,G. Möbus

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany（2008）

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摘要

Electron beam nanofabrication is a powerful technique to generate finest structures by atom ablation while concurrently observing the progress by TEM imaging [1–3].

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关键词

hole drilling, nanofabrication, electron tomography, nanobridges, nanotips

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