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An Overview of Nano-Micro-Meso Scale Manufacturing at the National Institute of Standards and Technology (NIST)

NANOTRIBOLOGY: CRITICAL ASSESSMENT AND RESEARCH NEEDS(2003)

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摘要
The future of nano-, micro- and meso-scale manufacturing operations will be strongly influenced by a new breed of assembly and manufacturing tools that will be intelligent, flexible, more precise, include in-process production technologies and make use of advanced part design, assembly and process data. To prioritized NIST efforts in nano, micro and meso manufacturing, several visits to industrial and government research laboratories and two workshops were organized. The identified needs at the meso and micro Scale include: dimensional and mechanical metrology, assembly and packaging technology and standards, and providing a science base for materials and processes emphasizing materials testing methods and properties data. Nanocharacterization, nanomanipulation, nanodevices and magnetics industry support have been identified at the nanoscale. Nanometrology and nanomanipulation have a substantial base from which to expand within the Manufacturing Engineering Laboratory (MEL). Therefore, MEL is initiating a new long-term Strategic Program in nanomanufacturing to conduct research and development, to provide the measurements and standards needed by industry to measure, manipulate and manufacture nanoscale discrete part products. The program will address the measurement and standards issues associated with the manufacture of both nanoscale products themselves, as well as with the development of the production systems required for their manufacture.
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关键词
nanodevices,discrete part manufacturing,measurement standards,nanomanipulation,assembly and packaging,nanocharacterization,dimensional metrology,nano-manufacturing,meso manufacturing.
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