Plasma Treatment of Polymers for Improving Al Adhesion

PET and Kapton thin films have been plasma processed in order to increase sputtered aluminum adhesion. The effect of different plasma feedings, such as NH 3 , O 2 , and He, has been evaluated on polymer/metal adhesion and on chemical modifications of polymer surface at different plasma power and treatment time. The chemistry at polymer/metal interface has been studied in order to find the suitable experimental conditions for transferring the plasma process to industrial scale. The role of acid-base reactions in promoting Polymer/Aluminum adhesion has been investigated. Surface composition has been investigated by X-ray Photoelectron Spectroscopy; adhesion measurements have been accomplished by 180° Peel Test.