Ziwei Fang

Ziwei Fang received the B.S. degree in physics from University of Science and Technology, China, in 1984, the M.S. degree from Shanghai Institute of Metallurgy, Shanghai, China, in 1987, and the Ph. D. degree in physics from the University of Newcastle, Newcastle, Australia, in 1995. Before he joined Varian Associates, CA, in 1998, he did postdoctoral research in electron momentum spectroscopy at the Flinders University of South Australia. He is now with Varian Semiconductor Equipment Associates, Gloucester, MA, as a Senior Scientist working on the development of plasma doping technology. His research interests include semiconductor material processing and characterization, with a focus on advanced transistor doping approaches for semiconductor devices.