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个人简介
Wim Fyen received the M.S. degree in chemical engineering, in 1995, and the Ph.D. degree in applied sciences, in 2003, both from Catholic University of Leuven, Belgium.
He became a Researcher at the Interuniversity Micro Electronics Centre (IMEC), Leuven. He was a member of the ultraclean processing group and was involved in environmental projects (pressure swing adsorption to reduce perfluorocompound emissions), post chemical–mechanical polishing cleaning, corrosion studies, wafer drying, rinse optimization and immersion lithography defectivity. For the latter project, he worked part-time at ASML, The Netherlands, for more than one year, in order to enhance technology transfer from IMEC to ASML. He is (co)author of more than 40 papers in the field of semiconductor wafer cleaning and holds several patents in the field of semiconductor wafer cleaning, coating, and immersion lithography. Currently, he works at the technology transfer office of the Catholic University of Leuven, where he is an Account Manager, responsible for 12 university colleges.
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论文共 55 篇作者统计合作学者相似作者
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Developments in Surface Contamination and Cleaningpp.795-854, (2008)
semanticscholar(2007)
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#Papers: 55
#Citation: 623
H-Index: 14
G-Index: 23
Sociability: 5
Diversity: 2
Activity: 0
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