S. R. Stiffler

Scott R. Stiffler GLOBALFOUNDRIES, Hopewell Junction, NY 12533 USA (scott.stiffler@globalfoundries.com). Dr. Stiffler received a B.S. and an M.S. degree from the University of Virginia in nuclear engineering and engineering physics, respectively, followed by a Ph.D. degree in materials science and engineering from Cornell University. He has worked in semiconductor process research and development since 1982, initially at IBM and then more recently at GLOBALFOUNDRIES. His most recent assignment has been that of Chief Technologist for the 14-nm technology described in this paper—responsible for all aspects of development from technology definition to subsequent production launch. He is currently a GLOBALFOUNDRIES Fellow.