Search
ChatPaper
AI Writing
analysis
Analysis
编组
Open Data
more
More
RankingsMust ReadingJournal&ConferenceAI TRAI HistoryMaster Reading TreeXiaomai's Star TalentsTrajectoryTalentNDI TrackerAI sign LanguageOpen
VIPCreated with Sketch.
Research Interests

Papers共 33 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
时间
引用量
主题
期刊级别
合作者
合作机构
Dielectric material etch selectivity control in dual-frequency capacitively coupled plasmas with dc-superposition
Du Zhang,Hojin Kim, Kathleen McInerney,Pingshan Luan, George Rogalskyj,Mingmei Wang
ADVANCED ETCH TECHNOLOGY AND PROCESS INTEGRATION FOR NANOPATTERNING XI (2022)
Cited0Views0Bibtex
0
0
Atomic level control of pattern fidelity during SAC etch
Mingmei Wang,Du Zhang, Shinya Morikita, Yanxiang Shi,Hojin Kim, Jeffery Lucas, Kensuke Taniguchi,Peter Biolsi
Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series (2021): 32-37
Cited1Views0Bibtex
1
0
SiOxFy layer deposition for cryogenic nanoscale etching
Gaëlle Antoun, Thomas Tillocher,Philippe Lefaucheux,Jack Nos, Aurélie Girard, Christophe Cardinaud,Jacques Faguet,Kaoru Maekawa, Du Zhang, Honjin Kim,Mingmei Wang, Rémi Dussart
HAL (Le Centre pour la Communication Scientifique Directe) (2021)
Cited0Views0Bibtex
0
0
Nanoscale cryogenic process for highly selective etch of Si3N4 over Si
Gaëlle Antoun,Thomas Tillocher, Philippe Lefaucheux,Aurélie Girard,Christophe Cardinaud,Jacques Faguet,Kaoru Maekawa,Du Zhang,Hojin Kim,Mingmei Wang, Rémi Dussart
HAL (Le Centre pour la Communication Scientifique Directe) (2021)
Cited0Views0Bibtex
0
0
Scaling of Atomic Layer Etching of SiO2 in Fluorocarbon Plasmas: Transient Etching and Surface Roughness
Xifeng Wang,Mark J. Kushner,Mingmei Wang,Peter Biolsi
2020 IEEE International Conference on Plasma Science (ICOPS)pp.198-198, (2020)
Cited0Views0EIWOSBibtex
0
0
Load More
Author Statistics
  • 合作者
  • 学生
  • 导师
No result temporarily, you can search similar Scholar with the same research interest
Data Disclaimer
The page data are from open Internet sources, cooperative publishers and automatic analysis results through AI technology. We do not make any commitments and guarantees for the validity, accuracy, correctness, reliability, completeness and timeliness of the page data. If you have any questions, please contact us by email: report@aminer.cn