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Luigi Scaccabarozzi,Vadim Yevgenyevich Banine, Bernardus Antonius Johannes Luttikhuis,Roelof Koole, Hendrikus Jan Wondergem, Petrus Carolus Johannes Graat

mag（2014）

Cited23Views0Bibtex

SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS, METHOD FOR REMOVING CONTAMINANT PARTICLES AND METHOD FOR MANUFACTURING A DEVICE

V V Ivanov,P S Antsiferov,Yurii Victorovitch Sidelnikov,Luigi Scaccabarozzi, Hendrik Antony Johannes Neerhof,Andrei Mikhailovich Yakunin,Erik Roelof Loopstra,Vadim Yevgenyevich Banine,Richard Joseph Bruls

mag（2013）

Cited25Views0Bibtex

Method of detecting a particle and a lithographic apparatus

Luigi Scaccabarozzi,V Banine, Christian Wagner

mag（2013）

Cited23Views0Bibtex

Extreme Ultraviolet Induced Defects on Few-Layer Graphene

A. Gao,P. J. Rizo,E. Zoethout,L. Scaccabarozzi,C. J. Lee,V. Banine,F. Bijkerk

Journal of applied physics（2013）

Cited12Views0Bibtex

Investigation of Euv Pellicle Feasibility

Luigi Scaccabarozzi, Dan Smith,Pedro Rizo Diago, Eric Casimiri,Nina Dziomkina,Henk Meijer

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2013）

Cited58Views0Bibtex

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Luigi Scaccabarozzi,Vadim Yevgenyevich Banine, V V Ivanov,Andrei Mikhailovich Yakunin

mag（2012）

Cited23Views0Bibtex

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