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论文共 63 篇作者统计合作学者相似作者

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EUV Mask Inspection Technologies with Actinic Tool for DRAM and Logic Lithography
Changjun Min, Daeho Sung, Jeong‐Min Kim, Hongcheol Kim, S. Ji, Hak-Seung Han, Jonggul Doh,Inyong Kang, Jin‐Ho Choi, Sang-Hee Lee, Doi S, Toshiyuki Todoroki, Hiroki Miyai, Jae‐Hee Han, Y. D. Jang
openalex（2024）
引用0浏览0引用
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Front Matter: Volume 10810
Ali Aghili, Hayden Alty, Sandrine Bayle, Amanda Bowhill, Rico Büttner, Chih‐Yu Chao, Jacky Chartoire, Ming Chen,Jackie Cheng,James Cheng,Jeffrey Cheng,Jin Young Choi, Hsin Chou, Kevin Chou,William Chou, GekSoon Chua, Verónica Dahl,Davide Dattilo, Guy DeRose,Christophe Detavernier, D Havé, S. Dietze, T Donga,Andreas Erdmann, Alexander Fay, Sylvie Fernandez, Terence Garvey, Alexis Girodon, Michael Green, M. Hashimoto,Jérôme Hazart, Heidarnia-Fathabad Zahra,Eric Hendrickx, Herrmann Heumann, Masaaki Hoshino, H. Allan Hunt,Inderhees Gregg,Takeshi Isogawa, Yangsoo Jang, Jian Wei,In-Yong Kang,Masatoshi Kotera,Takahiro Kozawa, Eun-Hye Kwon,Jeff Leclaire, Hong Li, Sang Yong Lee,Scott E. Lewis, Li,Vu Luong, Mariano Juste, Kohkichi Morimoto,C.A. Muryn, Rico Nestler, Vicky Philipsen,Ivan Pollentier, Mohamed Ramadan, Wen Ren, Douglas J. Resnick, Serap Savari, J Shiely, Aimin Song, Enke Tian, Grigore A. Timco,Vincent Truffert, C. H. Twu, Josh Tzeng, Robbert van de Kruijs, Wei Werthiem, James J. Willis, S. J. Yeates
openalex（2018）
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Study Of High Sensitivity Duv Inspection For Sub-20nm Devices With Complex Opcs
Sang Hoon Han, Hong Yul Jung, Sun Pyo Lee,In-Yong Kang,Gi Sung Yoon,Dong Hoon Chung,Chan-Uk Jeon,Yulia Brand,Yair Eran,Yoad Bar-Shean, Alexander Chereshnya, Chung Ki Lyu
PHOTOMASK TECHNOLOGY 2014 (2014)
引用1浏览0引用
1
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Printability Study of Pattern Defects in the EUV Mask As a Function of Hp Nodes
Tae-Geun Kim,Hwan-Seok Seo,In-Yong Kang,Chang Young Jeong,Sungmin Huh,Jihoon Na, Seong-Sue Kim,Chan-Uk Jeon,Iacopo Mochi,Kenneth A. Goldberg
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2012)
引用7浏览0引用
7
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“Problem-and-solution Approach” in Liquid Hydrocarbon Reforming for Fuel Cell Applications
Inyong Kang, Sangho Yoon,Sangho Lee,Joongmyeon Bae
한국신재생에너지학회 학술대회논문집pp.74-74, (2012)
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作者统计

#Papers: 64

#Citation: 1045

H-Index: 19

G-Index: 31

Sociability: 5

Diversity: 0

Activity: 0

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