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Research Interests

Papers共 46 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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Wet Chemical Processes for BEOL Technology
Cornelius Brown Peethala,James J. Kelly,Donald F. Canaperi,Mahadevaiyer Krishnan,Takeshi Nogami
Springer Handbook of Semiconductor DevicesSpringer Handbookspp.219-257, (2022)
Cited0Views0Bibtex
0
0
Metal Wet Recess Challenges and Solutions for Beyond 7nm Fully Aligned Via Integration
B. Peethala,D. Sil,B. Briggs,D. Rath,N. Lanzillo, K. Matam,H. Shobha,K. Choi,T. Spooner,D. Canaperi,B. Haran, M. Packiam, D. Janes, J. Casey, L. Chang,K. Ryan
2021 IEEE International Interconnect Technology Conference (IITC) (2021)
Cited2Views0EIWOSBibtex
2
0
Selective Deposition of AlOx for Fully Aligned Via in Nano Cu Interconnects
Son Van Nguyen,H. Shobha,C. B. Peethala,T. Haigh,H. Huang, J. Li,J. Demarest,B. Haran,Dennis Hausmann, P. Lemaire,K. Sharma, P. Ramani, A. Mahorowala
2021 IEEE International Interconnect Technology Conference (IITC) (2021)
Cited2Views0EIWOSBibtex
2
0
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Author Statistics

#Papers: 46

#Citation: 885

H-Index: 18

G-Index: 29

Sociability: 6

Diversity: 2

Activity: 0

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