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Fabrication of Non-Polar AlN Films by ICP Etching and Overgrowth by MBE

Amalia Fernando-Saavedra,Steven Albert,Ana Bengoechea-Encabo,Gordon Schmidt,Frank Bertram,Mengyao Xie,Achim Trampert,Juergen Christen,Miguel A. Sanchez-Garcia,Enrique Calleja

JOURNAL OF CRYSTAL GROWTH（2024）

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关键词
Molecular beam epitaxy,Nitrides,AlN,Pseudosubstrate,III-V semiconductors,Etching
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