Insights into High-Dose Helium Implantation of SiliconP. A. Aleksandrov, O. V. Emelyanova,S. G. Shemardov,D. N. Khmelenin,A. L. VasilievCrystallography Reports(2024)引用 0|浏览1AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要