Uniformity Improvement of Josephson Junction Resistance by Considering Al Deposition on a Resist Sidewall for Large-scale Integration of Qubits Tsuyoshi Takahashi, Norinao Kouma,Yoshiyasu Doi,Shintaro Sato,Shuhei Tamate, Y. Nakamuraopenalex(2022)引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要