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Ultra-flexible multichannel neural microelectrodes modified by pedot:pss/irox for enhanced sensing and localized stimulation

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)(2024)

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Abstract
We report an ultra-flexible multi-channel neural electrode with a novel modified approach to achieve the performance of high charge storage capacity. This kind of neural electrodes possess the thickness of similar to 2.5 mu m, the width of similar to 100 mu m, and bending stiffness of similar to 3.9x10(-13) N center dot m(2), which testify to its outstanding flexibility, higher biocompatibility and working stability. Moreover, ultrathin flexible neural electrode modified with PEDOT: PSS/IrOx has a high charge storage capacity of similar to 24.2 mC/cm(2), which is similar to 27.9 times and similar to 1.6 times of PEDOT:PSS and IrOx alone, presenting superior performance in electrical stimulation. The extremely thin thickness and modified nanomaterials both benefit longterm high-quality neurophysiological signal recording. By implanting the ultraflexible neural electrode, it was verified that the modified electrode had long-term stable signal recording ability for 6 weeks and good localized electrical stimulation effect, which demonstrated to be a powerful tool for the research of brain neuroscience.
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Key words
intracortical microelectrode,flexible probe,neural electrophysiological signal detection,stimulation
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