Universal Deoxidation of Semiconductor Substrates Assisted by Machine-Learning and Real-Time-Feedback-Control
ACS APPLIED MATERIALS & INTERFACES（2024）
关键词
molecular beam epitaxy,substrate,deoxidation,machine learning,real-time control
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要