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Fingertip sized external cavity quantum cascade laser based on MEMS grating

Atsushi Sugiyama,Takahide Ochiai, Kyosuke Nagasaka,Tatsuo Dougakiuchi,Tadataka Edamura,Naota Akikusa

2022 28th International Semiconductor Laser Conference (ISLC)（2022）

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Abstract
The extremely compact external cavity quantum cascade laser was realized with the MEMS grating. MEMS gratings with various resonant frequencies enabled two types of tunable and swept modes. The characteristics is shown, and we provide spectroscopy demonstration data.
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laser
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