Microsystem Vibrating Mesh Atomizer With Integrated Microheater For High Viscosity Liquid Aerosol Generation

Atomizers are used to generate an aerosol, which can be applied to numerous applications including inhaled drug delivery, ink jet printing, additive manufacturing, and spray cooling. However, current atomizing mechanisms either have poor droplet size uniformity or an inability to atomize liquids with viscosities >2 cP. This paper investigates a new MEMS based vibrating mesh technology with an integrated microheater to reduce the liquid viscosity and allow atomization to occur. The device aims to atomize high viscosity liquids while maintaining low span or narrow uniform droplet size distribution. The paper demonstrates the ability to atomize various high viscous liquids such as Su-8, PEDOT, and propylene glycol (PG).