Magnetometer Based on a Quartz MEMS Resonator with Two DETFs and a Stack of Magnetic Materials
2022 9TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (IEEE INERTIAL 2022)(2022)
摘要
This paper presents a resonating quartz MEMS magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials and the differential measurement of the resonance frequencies of two DETFs. It is targeted for applications such as magneto-inertial navigation. This sensor was fabricated using a wet HF/NH 4 F etching process and its working principle was proven correct with a magnetic sensitivity of 770 Hz/T.
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关键词
Magnetometer,IMU,MEMS,quartz,DETF,exchange bias
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