Molecular dynamics study on single particle displacement damage of ZB InN

Abstract To evaluate single-particle initial displacement damage of InN, the MD method is used to simulate the cascades, where the energy of PKA (E PKA) ranges from 1 to 5 keV. From these results, we can find that high EPKA will increase Np and Ns of defects, and aggravate the damage of InN, which is more obvious in Frenkel pairs. The formation efficiency of vacancy and interstitial is influenced by antisite defects, thereby causing the difference between vacancies and interstitials for the same atomic type. About the distribution of InN defects, it is mainly caused by vacancy defects, indicating that vacancy damage occupies the main position in displacement damage.