低k細孔シールのための有機シラン単分子層とスピンコーティングの最適化とスケールアップ【Powered by NICT】

Sun Yiting,Negreira Ainhoa Romo,Meersschaut Johan, Hoflijk Ilse,Vaesen Inge, Conard Thierry, Struyf Herbert,Tokei Zsolt, Boemmels Juergen, Moinpour Mansour, De Feyter Steven,Armini Silvia

Microelectronic Engineering（2017）

Cited 0|Views2

No score

Key words

nict】

AI Read Science

Must-Reading Tree

Example

Generate MRT to find the research sequence of this paper

Chat Paper

Summary is being generated by the instructions you defined